PFA / PTFE Wafer Cassettes
Fluoropolymer wafer cassettes with near-universal chemical resistance for HF, piranha, and RCA clean wet-bench chemistries.
Overview
PFA (perfluoroalkoxy) and PTFE (polytetrafluoroethylene) cassettes offer the broadest chemical resistance of any wafer carrier material available — inert to concentrated HF, HCl, H₂SO₄, H₂O₂, and the SC1/SC2 cleaning chemistries used in RCA clean and piranha etch stations. Where PEEK excels at high temperature, fluoropolymers excel at chemical inertness across an unmatched range of aggressive process chemicals.
Beyond chemical inertness, PFA and PTFE offer extractable metal levels below 1 ppb — critical for contamination-sensitive front-end processes — and a smooth, non-stick surface that minimizes particle adhesion and cross-contamination between lots. GINECHIP supplies PFA/PTFE cassettes in the same open, H-Bar, and C-Bar configurations as our PEEK line, across 100mm–300mm wafer diameters.
Technical Specifications
| Parameter | Available Range / Values |
|---|---|
| Material | PFA (perfluoroalkoxy), PTFE (polytetrafluoroethylene) |
| Wafer Diameter | 100mm (4″), 150mm (6″), 200mm (8″), 300mm (12″) |
| Slot Capacity | 25 slots (standard), 13 slots, 50 slots, custom slot counts |
| Temperature Range | -200°C to +260°C (PFA) |
| Chemical Resistance | Inert to concentrated HF, HCl, H₂SO₄, H₂O₂, SC1/SC2 chemistries |
| Extractable Metals | < 1 ppb |
| Surface Characteristics | Smooth, non-stick — minimizes particle adhesion |
| Configuration | Open cassette, H-Bar, C-Bar, SMIF Pod, FOUP-compatible |
| Standards | SEMI E1, SEMI E15, SEMI E57, SEMI E158 |
Applications
RCA clean, piranha etch, HF dip, and BOE etching — PFA and PTFE handle the full range of front-end wet chemistries without degradation or leaching.
Post-CMP wafer handling in slurry residue environments, where PFA's non-stick surface and chemical inertness prevent slurry particle carryover between lots.
Front-end and gate-oxide-adjacent handling where extractable metal levels below 1 ppb prevent trace-metal contamination of critical device layers.
PFA's -200°C to +260°C rating supports specialty processes spanning cryogenic sample handling through high-temperature diffusion in the same fab.
Quality & Certification
All PFA/PTFE cassettes are manufactured and packaged under ISO 9001:2015 certified quality management, with particle counting per IEST-RP-CC005 and dimensional verification against SEMI E1/E15/E57. Extractable metal levels are verified by ICP-MS on a per-lot basis for contamination-critical applications.
Need PFA or PTFE Cassettes?
Tell us your process chemistries and wafer diameter — our team will confirm compatibility and provide a detailed quotation within 24 hours.