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0.001–10,000 Ω·cm Resistivity Range
P / N / Intrinsic Doping & Type
100μm–1000μm Orientations
SSP · DSP · CMP · Epi-Ready Surface Finishes

Overview

Standard off-the-shelf wafers serve many applications, but breakthrough devices often require precisely tailored material properties that cannot be met by catalog specifications. Our material customization service lets you define the exact resistivity range, doping profile, crystal orientation, thickness, and surface condition needed for your device physics — then we source or fabricate wafers to those specifications.

We deliver industry-leading quality and precision.

Resistivity Customization

Resistivity Description

ParameterAvailable Range / Values
Resistivity Range 0.001–10,000 Ω·cm (custom narrow bands available)
Tolerance ±5% standard, ±2% tight, ±1% ultra-tight
Radial Uniformity ≤ 3% variation (4PP, 49-point map)
P-type Dopants Boron (B) — 0.001–10,000 Ω·cm
N-type Dopants Phosphorus (P), Arsenic (As), Antimony (Sb)
Intrinsic / High-Res > 1,000 Ω·cm (FZ, neutron-transmutation doped)
Heavily Doped < 0.005 Ω·cm (N+ Sb, P+ B for epi substrates)
Measurement Method 4-point probe, eddy current, Hall effect per SEMI MF84

Resistivity Paragraph 2

Doping Profile Engineering

Doping Description

P-Type (Boron-Doped)

Silicon wafers doped with boron for positive carrier (hole) conduction. Available with precisely controlled resistivity from heavily doped to near-intrinsic, with tight tolerance across the full wafer surface.

N-Type (Phosphorus/Antimony)

Silicon wafers doped with phosphorus or antimony for negative carrier (electron) conduction. Higher electron mobility compared to P-type for superior high-frequency device performance.

Intrinsic / High-Resistivity

Ultra-high resistivity silicon (> 10 kΩ·cm) for RF substrates, photodetectors, and radiation sensors. Minimal free carrier absorption for low-loss high-frequency applications. Achieved through float-zone refining or precise compensation doping.

Crystal Orientation Selection

Orientation Description

ParameterAvailable Range / Values
Standard Orientations 〈100〉, 〈111〉, 〈110〉
Off-Cut / Vicinal 0.5°–6.0° toward 〈110〉, 〈111〉, or 〈211〉
Tolerance ±0.1° standard, ±0.05° precision
Flat Alignment SEMI M1 primary/secondary flat or notch
Wafer ID Laser Mark SEMI T7 OCR-compatible, alphanumeric, dot-matrix

H 100Title

H 100Ul

H 111Title

H 111Ul

Orientation Paragraph 2

Thickness Customization

Thickness Description

ParameterAvailable Range / Values
Standard Range 200μm–1000μm
Ultra-Thin 100μm–200μm (ground + stress-relieved)
TTV (Total Thickness Variation) < 2μm standard, < 1μm tight
Bow < 30μm standard, < 10μm tight
Warp < 40μm standard, < 15μm tight
Surface Roughness (Ra) < 0.5nm CMP, < 5nm DSP, < 50nm lapped

Thickness Paragraph 2

Surface Finish Options

Surface Finish Description

CMP Polished

Chemical-mechanical planarization. Single-side or double-side polished wafers with sub-nanometer surface roughness for epitaxial growth and direct wafer bonding.

  • Ra < 0.5nm (AFM, 10×10μm scan)
  • Haze < 0.2 ppm (SP1/Tencor)
  • Available single-side or double-side

Single-Side Polished (SSP)

Front-side polished to device-grade finish (< 0.5nm Ra), back-side etched or lapped. Cost-effective option for applications where only the device side requires optical-quality surface.

  • Front: CMP (Ra < 0.5nm)
  • Back: bright-etched or lapped
  • SEMI M1 compliant

Double-Side Polished (DSP)

Both sides polished to high-quality finish. Required for MEMS fabrication with through-wafer features, optical applications, and wafer bonding requiring both surfaces to be pristine.

  • Both sides Ra < 0.5nm
  • Improved wafer flatness
  • 200mm and 300mm available

Epi-Ready Finish

Ultra-clean, particle-free surface optimized for epitaxial growth. Native oxide controlled to < 1nm. HF-last or ozone-last clean process available. Shipped in nitrogen-purged packaging.

  • Native oxide < 5Å (ellipsometry)
  • COP-free for high-quality epi
  • N₂-purged packaging

Lapped / As-Cut

Economical finish for bulk mechanical applications, thermal test wafers, and process development where optical-grade surface is not required. Surface roughness typically 0.2–0.5μm Ra.

  • Ra 0.5–5.0μm
  • Fast delivery
  • Bulk pricing available

Backside Treatments

Backside Description

Gettering Title

Gettering List

Dielectric Backside Title

Dielectric Backside List

Special Material Grades

Special Description

Backside Oxide / Poly-Silicon

Thermal oxide or deposited poly-silicon layer on wafer backside for gettering of metallic impurities during high-temperature processing. Essential for maintaining bulk lifetime in power devices.

Bulk Micro Defect (BMD) Engineering

Controlled oxygen precipitation to create internal gettering sites for metallic impurities. BMD density and denuded zone depth tailored to your thermal budget and device architecture requirements.

Crystal Originated Particle (COP) Control

COP-free or COP-reduced silicon wafers for defect-sensitive applications. Achieved through optimized crystal growth parameters and post-growth annealing. Critical for gate oxide integrity in advanced CMOS and flash memory.

Applications

App Item Power
App Item Rf
App Item Mems
App Item Photonics
App Item Cis
App Item Epi

Quality & Certification

Every custom wafer lot is accompanied by a comprehensive Certificate of Analysis including: 4-point probe resistivity map (full wafer), doping concentration verification (SIMS or SRP), crystal orientation verification (XRD), thickness map, surface roughness measurement (AFM or optical profilometry), and particle count (per IEST-STD-CC1246).

Quality Paragraph 2

Need Custom Material Specifications for Your Device?

Tell us your required resistivity, doping, orientation, thickness, and surface finish — and we'll provide a detailed quotation within 24 hours.

ISO 9001:2015 SEMI Standards Full Certification Custom Specifications