Glass Substrates

Fused Silica · Borosilicate · QuartzMaterial Options

100mm–300mmDiameter Range

> 90% TransmissionUv To Near IR

RMS < 0.5nmCmp Surface Finish

Overview

A comprehensive overview of our capabilities and services.

We deliver industry-leading quality and precision.

Material Types

Fused Silica (UV-Grade)

High-purity synthetic fused silica with exceptional UV transmission (down to 185nm), ultra-low thermal expansion (CTE 0.55 × 10⁻⁶/K), and superior laser damage threshold. Ideal for photomask substrates, optical windows, and precision optics. Available 100mm–300mm.

Transmission: 185nm–2.1μm with > 90% T
Extremely low autofluorescence
High laser damage threshold
Available in JGS1 (UV), JGS2, JGS3 grades
CMP-finished to sub-nanometer RMS

Borofloat® 33

Borofloat® 33 is a borosilicate glass wafer with excellent thermal shock resistance (CTE 3.25 × 10⁻⁶/K), high chemical durability, and exceptional flatness. Widely used for anodic bonding with silicon and microfluidic device fabrication. Available in 100mm–200mm diameters.

CTE: 3.25 ppm/K — matched to silicon
Transformation temp: 525°C
High chemical resistance (hydrolytic class 1)
Available DSP with excellent flatness
Suitable for through-glass via (TGV) processing

Af 32Name

Af 32Desc

CTE: 3.2 ppm/K — silicon-matched
Low dielectric loss: tan δ ~ 0.004 at 10 GHz
Available as thin as 100μm
Excellent for TGV interposers in 2.5D packaging
No alkali migration issues for TFT backplanes

D 263Name

D 263Desc

Available in thicknesses from 30μm–1100μm
High transmission from 350nm–2.5μm
Refractive index n = 1.5230
Smooth fire-polished surface
Cost-effective for high-volume applications

Single-Crystal Quartz

Single crystal quartz wafers with precise crystallographic orientation, excellent piezoelectric properties, and high Q-factor for RF resonator and SAW filter applications. Available with AT-cut, ST-cut, and custom orientations. Diameters from 100mm to 150mm.

Piezoelectric coefficient d₁₁ = 2.31 pC/N
AT-cut for temperature-stable resonators
High Q-factor for low phase noise oscillators
Available from 2″ to 4″ wafers
Custom crystallographic orientations

Soda Lime Float Glass

Economical soda lime glass wafers for research, prototyping, and non-critical applications. Good optical clarity and surface quality. Ideal for microfluidic device development, wafer bonding test vehicles, and educational use. Standard 100mm–150mm diameters.

Soda-lime: lowest cost, widely available
Aluminosilicate: high scratch resistance
Custom glass compositions supported
Thin (< 100μm) and ultra-thin available
Prototyping and small-batch friendly

Technical Specifications

Parameter	Available Range / Values
Materials	Fused Silica (SiO₂), Borosilicate Glass (Borofloat® 33, AF32® eco, D263®), Quartz (single-crystal), Soda-Lime, Alkali-Free Glass
Diameter	100mm (4″), 150mm (6″), 200mm (8″), 300mm (12″)
Thickness	100μm–1100μm (ultra-thin 50μm available for flexible substrates)
Surface Quality	DSP, SSP, CMP-finished; S/D 40/20 or better per MIL-PRF-13830B
Surface Roughness	RMS < 0.5nm (CMP), < 1.0nm standard polish
TTV / Bow / Warp	TTV < 3μm, Bow < 20μm (fused silica); custom specifications available
CTE	0.55 ppm/K (fused silica), 3.2 ppm/K (AF32), 7.2 ppm/K (D263), 3.25 ppm/K (Borofloat)
Transmission	> 90% from 185nm–2.1μm (fused silica); D263: > 90% from 350nm–2.5μm
Refractive Index (n₅₈₉)	Fused Silica: 1.458; Borosilicate: 1.471–1.473; D263: 1.523; AF32: 1.510
Dielectric Constant	3.8 (fused silica), 4.6 (borosilicate), 5.1–6.9 (alkali-free glass) at 1 MHz
Packaging	Interleaved with cleanroom paper, single-wafer cassette, vacuum-sealed outer bag

Applications