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Silicon Photonics PlatformTechnology
< 0.2nm RMSResolution
150mm/200mm WafersCapacity
ISO 9001:2015Certification

Overview

Photonics and LiDAR are core technologies for next-generation sensing and data communication. GINECHIP offers a full range of photonic and LiDAR substrate solutions, spanning silicon photonics SOI wafers, InP photonic integrated circuit substrates, GaAs VCSEL arrays, and Si₃N₄ waveguide substrates — supporting applications from data center optical interconnects to autonomous-driving LiDAR.

We deliver industry-leading quality and precision — every photonics substrate is rigorously verified for surface quality and optical performance.

Material Platforms

Silicon Photonics (SOI)

Silicon-on-insulator photonic platform with sub-1dB/cm waveguide loss, integrated Mach-Zehnder and ring modulators, and Ge-on-Si photodetectors for O-band and C-band transceivers.

Substrate: SOI (220nm Si / 2μm BOX)Waveguide loss: < 1 dB/cmModulator: Mach-Zehnder, ringPhotodetector: Ge-on-SiWavelength: O-band, C-bandDiameters: 200mm, 300mm

Indium Phosphide (InP) Photonics

Monolithic InP platform integrating DFB/DBR lasers, semiconductor optical amplifiers, and high-speed electro-absorption modulators for active photonic components spanning 1.3–1.6μm.

Substrate: InP (S.I. or N-type)DFB/DBR lasers: 1.3–1.6μmSOA: 20+ dB gainEAM: 40+ GHz bandwidthAWG: 40–96 channelDiameters: 2″, 3″, 4″

Silicon Nitride (Si₃N₄) Photonics

Ultra-low-loss silicon nitride waveguides support high-power CW operation and Kerr comb generation, ideal for narrow-linewidth lasers, sensing, and nonlinear photonics.

Si₃N₄ thickness: 100–800nmLoss: < 0.1 dB/cm (visible/IR)Power handling: > 1W (CW)Nonlinear: Kerr comb generationCladding: SiO₂ (TEOS or thermal)Diameters: 100mm, 150mm, 200mm

GaAs VCSEL & Laser Diode Platform

GaAs-based epitaxial platform for 808–940nm VCSELs and edge-emitting lasers, with AlGaAs/GaAs DBR mirrors and InGaAs quantum wells for illumination and lidar emitters.

Substrate: GaAs (N-type, 6″)Wavelength: 808nm, 850nm, 940nmDBR: 20–40 pairs AlGaAs/GaAsQW: InGaAs or GaAs/AlGaAsPower: mW to multi-Watt arraysEpi-ready or patterned substrates

Lithium Niobate on Insulator (LNOI)

Thin-film lithium niobate platform delivering over 100GHz modulation bandwidth and low Vπ·L, enabling next-generation electro-optic modulators for coherent optical communications.

LNOI: 300–700nm LiNbO₃ filmr₃₃ = 30.8 pm/VModulator BW: 100+ GHzVπ·L < 2 V·cmHandle: LiNbO₃ or SiDiameters: 3″, 4″, 6″

LiDAR Technology

Direct Time-of-Flight (Flash) Lidar

GaAs-based pulsed laser arrays combined with MOCVD-grown DBR and quantum-well epitaxy deliver 50–500W peak power for automotive and industrial flash lidar illuminators.

Substrate: GaAs 6″Wavelength: 905nm, 940nmPeak power: 50–500W (array)Pulse width: 1–10nsRep rate: 100kHz–2MHzEpi: MOCVD-grown DBR + QWs

FMCW Coherent Lidar

InP and silicon photonics platforms enable frequency-modulated continuous-wave lidar with coherent detection, extending range beyond 200–500m while providing instantaneous velocity data.

Substrate: InP, SOI (SiPh)Wavelength: 1530–1570nmFiber laser: Er-dopedPulse energy: μJ to mJRange: 200–500m+Coherent detection (FMCW)

SPAD / dToF Detector Arrays

CMOS-compatible single-photon avalanche diode arrays on specialty silicon epitaxy achieve sub-100ps timing jitter for direct time-of-flight ranging in compact receiver modules.

Substrate: Si (specialty epi)Pixel pitch: 10–50μmTiming jitter: < 100ps FWHMPDE: 20–40% (905nm)Array size: 64×64 to 512×512CMOS-compatible process

SOI Specifications

ParameterStandard SpecAdvanced Spec
Device Layer Thickness220nm ± 5nm220nm ± 2nm (or custom)
BOX Layer Thickness2.0μm ± 5%2.0μm ± 2% (or 3.0μm)
Handle Wafer725μm Si (100)725μm HR-Si (>1kΩ·cm)
Si Layer Uniformity< 2nm (1σ)< 1nm (1σ)
BOX Uniformity< 1% (1σ)< 0.5% (1σ)
Diameter200mm200mm, 300mm
Surface Roughness< 0.2nm RMS< 0.15nm RMS
Particle Count< 20 @ 0.12μm< 10 @ 0.09μm

Specifications above are based on standard products. Custom specifications available upon request.

Applications

Automotive ADAS & Autonomous Driving

Solid-state lidar and photonic sensors provide the range and angular resolution required for L2+ driver assistance and autonomous vehicle perception stacks.

Robotics & Industrial Automation

Compact lidar and photonic sensing modules enable obstacle avoidance, SLAM navigation, and precision metrology for mobile robots and factory automation.

Telecom & Datacom Optical Transceivers

Silicon and InP photonic integrated circuits power 100G–800G optical transceivers for data center interconnects and long-haul telecom networks.

AR/VR & Consumer Sensing

VCSEL arrays and photonic structures support depth sensing, eye tracking, and structured-light projection in augmented and virtual reality devices.

Biomedical & Environmental Sensing

Photonic integrated circuits enable compact spectroscopy, gas sensing, and point-of-care diagnostics through waveguide-based optical sensing platforms.

Aerospace & Defense

Radiation-tolerant photonic and lidar components support free-space optical communication, targeting, and remote sensing in aerospace and defense systems.

Waveguide Technology

Silicon and silicon nitride waveguide platforms available with propagation losses as low as 0.5 dB/cm. Single-mode and multi-mode waveguide designs supported. Our photolithography and etching processes achieve vertical sidewalls with roughness below 5nm RMS for low scattering loss.

Epitaxial Quality

Epitaxial layers are characterized by photoluminescence mapping, X-ray diffraction rocking curve analysis, and surface defect density measurement. We guarantee epi-layer uniformity within 2% across the entire wafer, with RMS surface roughness below 0.2nm.

Ready to Get Started?

Contact our engineering team to discuss your specific requirements and receive a detailed quotation within 24 hours.

ISO 9001 Certified SEMI Standards Compliant Epi-Ready Surface Custom Film Stacks