Substrates
MEMS Process
Reprocessing
Accessories
Resources
Technical Articles
Company
Shop
2″ – 4″ Diameter Diameter Range
SI > 10⁷ Ω·cm Semi-Insulating
Epi-Ready < 2Å RMS Surface Finish
VGF / LEC Growth Growth Methods
InP wafers in stock — browse 2″–4″ diameters and doping options now.
Shop InP Wafers

Overview

Indium Phosphide (InP) is a compound semiconductor with a direct bandgap of 1.344 eV and high electron mobility of 5,400 cm²/V·s.

Choose substrate options including SI Fe-doped (>10⁷ Ω·cm), N-type S or Sn, and P-type Zn; available orientations are (100), (111)A, and (111)B with off-cut 2° or 3° toward (110) and diameters of 2″–4″.

Epi-Ready surfaces target RMS <2Å for strong epitaxy readiness, with compliance to SEMI M1–M13 plus RoHS and REACH.

Epi-Ready InP substrates with EPD down to <5×10³/cm² (advanced grade).

Crystal Growth Methods

We grow InP using VGF and LEC techniques to support different requirements for quality and epitaxy readiness.

Prime

VGF Prime

Best yield & quality

Diameter 2″ – 4″
EPD < 5×10³ – 5×10⁴/cm²
Resistivity SI & doped
Application Photonics / Laser

VGF (Vertical Gradient Freeze) InP is designed for low dislocation density and high resistivity. It offers the best yield and quality for photonic and laser substrate applications, with EPD controlled in the <5×10³–5×10⁴/cm² range.

Volume

LEC Volume

Mature volume production

Diameter 2″ – 6″
EPD 5×10⁴–1×10⁵/cm²
Resistivity SI & doped
Application Electronics / HBT

LEC (Liquid-Encapsulated Czochralski) InP is optimized for mature volume production and stable process control. It is a strong fit for larger-diameter wafers, with EPD typically in the 5×10⁴–1×10⁵/cm² range for good overall volume performance.

Growth Method Comparison

Compare VGF, LEC, and emerging VCZ to match your priority, whether it is EPD performance, resistivity targeting, or overall yield for epi applications.

LEC Volume Production

LEC provides mature volume production for larger InP wafer diameters, supporting scalable manufacturing.

LEC EPD 5×10⁴–1×10⁵/cm² Volume size: 2″ – 6″

Emerging: VCZ Process

Vapor-pressure-controlled Czochralski (VCZ) is emerging for InP wafers with lower In-vacancy density, supporting next-generation photonic and electronic device requirements.

Lower In-vacancy density R&D & pilot scale

Photonics & Laser Applications

Indium Phosphide has a direct bandgap of 1.344 eV, enabling efficient light emission for laser diodes and photonic integrated circuits at telecom wavelengths of 1310 nm and 1550 nm.

InP wafers support DFB lasers, tunable lasers, and EMLs (electro-absorption modulated lasers) used in data centers, 5G optical transport, and coherent optical networks.

On-chip photonic integration combines lasers, modulators, waveguides, and photodetectors on a single InP chip for compact, high-speed optical modules.

High electron mobility of 5,400 cm²/V·s and low optical loss make InP the substrate of choice for 800G and 1.6T optical transceivers.

mmWave & High-Speed Electronics

InP HEMTs and HBTs deliver the highest gain and efficiency at mmWave frequencies for 5G/6G, radar, and satellite communications.

InP wafers enable THz-capable devices and ultra-high-speed mixed-signal circuits, with fT/fmax beyond 300 GHz.

InP for 5G/6G, radar & satellite — fT/fmax beyond 300 GHz

Technical Specifications

ParameterAvailable Range / Values
Diameter 2″ (50.8mm), 3″ (76.2mm), 4″ (100mm)
Dopant Type N-type S-doped, N-type Sn-doped, SI Fe-doped, P-type Zn-doped
Resistivity N-type: 10⁻³–10⁻¹ Ω·cm; SI Fe-doped: > 10⁷ Ω·cm
Crystal Orientation (100), (111)A, (111)B, off-cut 2° or 3° toward (110)
Thickness 350μm, 500μm, 625μm standard (custom on request)
Surface Polish SSP, DSP, Epi-Ready — RMS < 2Å (AFM 5×5μm)
EPD (Etch Pit Density) < 5×10⁴/cm² (prime); < 5×10³/cm² (advanced grade)
TTV / Bow / Warp TTV < 5μm, Bow < 10μm, Warp < 15μm
Electron Mobility (μₑ) 5,400 cm²/V·s (N-type InP at 300K)
Bandgap 1.344 eV (direct, zincblende structure)
Thermal Conductivity 68 W/m·K at 300K
Growth Methods VGF (Vertical Gradient Freeze), LEC (Liquid-Encapsulated Czochralski)
Backside Treatment Etched, polished, or laser-marked per customer specification
Laser Mark SEMI M12/M13 compliant: soft-mark on front or back side
Flat Configuration Per SEMI M1: EJ or US standard flat per diameter
Particle Count @ 0.3μm ≤ 10 particles (laser surface scan)
Packaging Vacuum-sealed, single-wafer shippers, Class 100 cleanroom
Compliance SEMI M1–M13, RoHS, REACH

Applications

📡

Optical Communications

InP lasers and photodetectors power high-speed optical networks, from data centers to submarine cables.

📷

Photodetectors & Imaging

InP photodetectors deliver high responsivity and low dark current for telecom, sensing, and imaging applications.

⚡

High-Frequency Electronics

High electron mobility of 5,400 cm²/V·s supports HBT and HEMT devices for high-speed digital and analog circuits.

〰️

Photonic Integrated Circuits

On-chip integration of lasers, modulators, and waveguides enables compact PICs for next-generation optical modules.

🧪

R&D & Quantum Photonics

Research-grade InP substrates support quantum photonics, entangled-photon sources, and advanced epitaxy development.

🛰️

Satellite & Aerospace

Radiation-tolerant InP optoelectronics support satellite laser communication and aerospace systems.

Quality & Certification

GINECHIP InP wafers are produced under ISO 9001:2015 with 100% inspection, and available to match SEMI M1–M13 standards as well as RoHS/REACH requirements.

Crystal Orientation Check X-ray diffraction verification for (100)/(111)A/(111)B with off-cut 2° or 3° toward (110).
EPD Measurement Etch pit density limits: prime <5×10⁴/cm² and advanced grade <5×10³/cm².
Wafer Geometry Control Geometry specifications: TTV<5μm, Bow<10μm, Warp<15μm.
AFM Surface Roughness AFM roughness limit: RMS <2Å on a 5×5μm scan.
Resistivity & Hall Mapping N-type: 10⁻³–10⁻¹ Ω·cm; SI Fe-doped: >10⁷ Ω·cm.
Particle Count (Laser Scan) Particle limit by laser surface scan: ≤10 particles @ 0.3μm.
Laser Mark Verification SEMI M12/M13 compliant soft-mark is applied on the front or back side for laser mark verification.
Visual & Packaging Inspection Final visual and packaging inspection is performed with vacuum-sealed single-wafer shippers in a Class 100 cleanroom.

Request an InP Quote

Share your custom specifications and we will prepare a quote. Send your requirements to our team for a fast response.

ISO 9001:2015 SEMI M1–M13 SI Fe-doped / Doped RoHS / REACH