PEEK Wafer Cassettes
High-temperature, chemical-resistant PEEK wafer cassettes for furnace loading, hot acid baths, and diffusion processes up to 260°C.
Overview
PEEK (polyetheretherketone) is the premier engineering plastic for semiconductor wafer cassettes that must survive repeated cycling through the hottest, most chemically aggressive steps in the fab. A continuous use temperature of 260°C makes PEEK cassettes the standard choice for furnace loading, hot acid baths, and diffusion processes where lesser polymers soften, warp, or outgas.
Beyond thermal stability, PEEK offers exceptional mechanical strength and dimensional stability through thousands of thermal cycles, minimal outgassing suitable for vacuum-adjacent processes, and — in carbon-filled grades — surface resistivity of 10⁴–10⁹ Ω/sq for ESD protection of sensitive gate oxides. GINECHIP supplies PEEK cassettes in open, H-Bar, C-Bar, and SMIF/FOUP-compatible configurations across 100mm–300mm wafer sizes.
Technical Specifications
| Parameter | Available Range / Values |
|---|---|
| Material | PEEK (polyetheretherketone), carbon-filled PEEK (ESD-safe grade) |
| Wafer Diameter | 100mm (4″), 150mm (6″), 200mm (8″), 300mm (12″) |
| Slot Capacity | 25 slots (standard), 13 slots, 50 slots, custom slot counts |
| Temperature Range | -40°C to +260°C continuous use |
| ESD Protection (carbon-filled) | 10⁴–10⁹ Ω/sq surface resistivity |
| Chemical Resistance | Excellent resistance to acids, bases, and organic solvents |
| Outgassing | < 0.1% TML, < 0.01% CVCM per ASTM E595 (space-grade available) |
| Configuration | Open cassette, H-Bar, C-Bar, SMIF Pod, FOUP-compatible |
| Standards | SEMI E1, SEMI E15, SEMI E57, SEMI E158 |
Applications
High-temperature loading and unloading up to 260°C continuous — PEEK is required where lesser polymers would deform or outgas contaminants into the furnace tube.
RCA clean, piranha etch, and hot acid baths where PEEK's excellent resistance to acids, bases, and organic solvents prevents cassette degradation and particle generation.
Minimal outgassing profile (< 0.1% TML per ASTM E595) suitable for load-lock adjacent handling and low-pressure CVD staging areas.
Carbon-filled ESD-safe PEEK grades (10⁴–10⁹ Ω/sq) protect sub-2nm gate oxides during high-temperature process steps in advanced CMOS fabs.
Quality & Certification
Every PEEK cassette is manufactured and packaged under ISO 9001:2015 certified quality management, with outgassing testing per ASTM E595, dimensional verification against SEMI E1/E15/E57, and ESD performance validation per ANSI/ESD S20.20 where applicable. Certificates of Conformance ship with every lot.
Need PEEK Cassettes for Your Process?
Specify your wafer diameter, slot count, and ESD requirement — our team will confirm compatibility and provide a detailed quotation within 24 hours.