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10⁴–10¹¹ Ω/sqSurface Resistivity
< 0.5 secStatic Decay
100mm–300mmWafer Compatibility
SEMI E1·E15·E57Standards

Overview

Electrostatic discharge is a leading cause of device damage in advanced semiconductor manufacturing, particularly for gate oxides thinner than 2nm at advanced logic nodes. GINECHIP's anti-static and ESD-safe polypropylene cassettes use conductive carbon loading or anti-static additives to control charge buildup across three protection tiers: static-dissipative (10⁶–10⁹ Ω/sq) for controlled, gradual charge bleed-off; conductive (below 10⁴ Ω/sq) for rapid dissipation protecting the most sensitive devices; and topical anti-static treatments for general-purpose, cost-sensitive applications.

Beyond ESD performance, these cassettes are significantly lighter than metal alternatives, reducing wear on automated material handling systems (AMHS) and operator fatigue during manual handling. Available with customizable resistivity, black or process-identification colors, and slot configurations from 13 to 50 wafers across 150mm–300mm diameters.

Technical Specifications

ParameterAvailable Range / Values
Material Antistatic/ESD polypropylene (PP), carbon-loaded conductive PP
Wafer Diameter 150mm (6″), 200mm (8″), 300mm (12″)
Slot Capacity 25 slots (standard), 13 slots, custom slot counts
Surface Resistivity 10⁴–10¹¹ Ω/sq (customizable)
Static Decay < 0.5 seconds per MIL-B-81705C
Protection Tiers Static-dissipative (10⁶–10⁹ Ω/sq), Conductive (< 10⁴ Ω/sq), Topical anti-static
Color Black (standard) or custom for process identification
Weight 50% lighter than metal alternatives
Standards SEMI E1, SEMI E15, SEMI E57, ANSI/ESD S20.20

Applications

Wafer Transport & Storage

Interbay and intrabay AMHS transport and stocker storage, where lightweight ESD-safe PP reduces automation wear compared to metal or PEEK alternatives.

Metrology & Inspection

CD-SEM, defect review, and film thickness measurement stations where low-outgassing, particle-controlled ESD-safe cassettes protect metrology chamber cleanliness.

General Cleanroom Handling

Day-to-day wafer handling in Class 100 / ISO 5 and above cleanroom environments where cost-effective ESD protection is required without extreme chemical or thermal demands.

Gate-Oxide-Sensitive Device Protection

Conductive-grade cassettes (below 10⁴ Ω/sq) for advanced CMOS devices with sub-2nm gate oxides that cannot tolerate any uncontrolled static discharge.

Quality & Certification

All ESD-safe PP cassettes are manufactured under ISO 9001:2015 certified quality management, with ESD performance validated per ANSI/ESD S20.20 and static decay tested per MIL-B-81705C. Surface resistivity is verified on every production lot, with test data available on request.

Need ESD-Safe PP Cassettes?

Tell us your resistivity requirement and wafer diameter — our team will confirm compatibility and provide a detailed quotation within 24 hours.

ISO 9001:2015 ANSI/ESD S20.20 Validated Custom Resistivity Grades Lightweight AMHS-Friendly