Vacuum-Sealed Wafer Shippers
Hermetically sealed, nitrogen-backfillable containers for moisture- and oxidation-sensitive wafer materials.
Overview
Vacuum-sealed shippers protect wafer materials that degrade on contact with atmospheric moisture or oxygen — most notably III-V compound semiconductor substrates such as GaAs and InP, whose surfaces are far more reactive than silicon. Each container achieves a hermetic seal with a leak rate below 1×10⁻⁶ atm·cc/sec (helium), verified before every shipment, and can be evacuated and backfilled with dry nitrogen or argon to create an inert transport atmosphere.
A humidity indicator card is included as standard in every unit, giving receiving personnel an immediate visual confirmation that the hermetic seal held throughout transit, and an integrated desiccant pack maintains internal moisture below 10 ppm for extended storage periods exceeding twelve months. This makes vacuum-sealed shippers the preferred choice for both long-distance international freight and long-term wafer banking.
Technical Specifications
| Parameter | Available Range / Values |
|---|---|
| Wafer Diameter | 100mm (4″), 150mm (6″), 200mm (8″), 300mm (12″) |
| Seal Type | Hermetic vacuum seal, O-ring gasket, nitrogen backfill port |
| Leak Rate | < 1×10⁻⁶ atm·cc/sec (helium mass spectrometry) |
| Moisture Level | < 10 ppm with integrated desiccant pack |
| Backfill Gas | Dry nitrogen or argon for inert atmosphere transport |
| Body Material | Conductive PP, PTFE, PEEK (premium high-temp variant) |
| Monitoring | Humidity indicator card (standard), shock indicator (optional) |
| Cleanroom Class | ISO Class 4–5 (Class 10–100) assembled and packaged |
| Standards | SEMI E154, ISTA 3A, ASTM D4169, UN 4G/4H (dangerous goods option) |
Applications
Inert-atmosphere transport for GaAs, InP, and other compound semiconductor wafers sensitive to oxidation.
Desiccant-monitored hermetic storage for wafer inventory held longer than twelve months.
Sealed atmosphere control for freshly-processed surfaces awaiting the next fab step.
Long-transit air and ocean freight where atmospheric exposure time is extended and unpredictable.
Quality & Certification
Every vacuum-sealed shipper is leak-tested to below 1×10⁻⁶ atm·cc/sec (helium mass spectrometry) prior to shipment, with desiccant capacity verified for the specified storage duration. Assembly occurs in an ISO Class 4–5 cleanroom under ISO 9001:2015 quality management, with full lot traceability from raw material to final seal.
Need Vacuum-Sealed Shippers?
Tell us your substrate material, required backfill gas, and storage duration — we'll confirm hermetic performance and lead time within 24 hours.