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100mm – 300mm fusedSilicaQuartzSub.statLabelDiameter

> 90% @ 185nm fusedSilicaQuartzSub.statLabelUvTransmission

0.55 ppm/K fusedSilicaQuartzSub.statLabelCte

< 0.5nm RMS fusedSilicaQuartzSub.statLabelRoughness

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fusedSilicaQuartzSub.overviewP1

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UV-Grade (JGS1)

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Transmission @ 185nm > 90%

OH Content ~1,200 ppm

Impurity (Metals) < 1 ppm total

Best For UV Optics, Photomasks

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IR-Grade (JGS3)

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Transmission @ 2.7μm > 85%

OH Content < 10 ppm

Impurity (Metals) 10–50 ppm

Best For IR Optics, Process Chambers

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Synthetic Fused Silica

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Transmission @ 193nm > 99.7%/cm

OH Content 800–1,200 ppm

Impurity (Metals) < 0.1 ppm

Best For DUV, Excimer Lasers

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fusedSilicaQuartzSub.opticalPropertiesDesc

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Key λ: 193nm (ArF) T > 99.7%/cm

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Key λ: 365nm (i-line) T > 92%

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Key λ: 1,550nm (Telecom) T > 92%

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fusedSilicaQuartzSub.processingDesc

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Parameter	Available Range / Values
Material Grade	UV-grade (JGS1), IR-grade (JGS3), Synthetic Fused Silica
Diameter	100mm (4″), 150mm (6″), 200mm (8″), 300mm (12″)
Thickness	200μm–1100μm, custom ±10μm tolerance
Surface Roughness	RMS < 0.5nm standard, < 0.3nm premium
TTV (Total Thickness Variation)	≤ 3μm standard, ≤ 1μm premium
Bow / Warp	Bow ≤ 20μm, Warp ≤ 25μm
Transmission @ 185nm	> 90% UV-grade, > 85% standard
Refractive Index	n₅₈₉ = 1.4585
CTE (Coefficient of Thermal Expansion)	0.55 × 10⁻⁶/K (20–300°C), nearly zero thermal expansion
Dielectric Constant	3.8 at 1 MHz
Softening Point	~1,600°C (synthetic fused silica)
Density	2.20 g/cm³
Surface Quality	S/D 40/20 per MIL-PRF-13830B or better
Packaging	Class 100 cleanroom, interleaved, vacuum-sealed cassette or single-wafer shippers

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🔬

fusedSilicaQuartzSub.appPhotomasks

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〰️

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⚡

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fusedSilicaQuartzSub.appPrecisionOptics

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fusedSilicaQuartzSub.metrologyDesc

fusedSilicaQuartzSub.metrologySpectrophotometry fusedSilicaQuartzSub.metrologySpectrophotometryDesc

fusedSilicaQuartzSub.metrologyAfm fusedSilicaQuartzSub.metrologyAfmDesc

fusedSilicaQuartzSub.metrologyInterferometry fusedSilicaQuartzSub.metrologyInterferometryDesc

fusedSilicaQuartzSub.metrologyParticle fusedSilicaQuartzSub.metrologyParticleDesc

fusedSilicaQuartzSub.metrologyXrf fusedSilicaQuartzSub.metrologyXrfDesc

fusedSilicaQuartzSub.metrologyFtir fusedSilicaQuartzSub.metrologyFtirDesc

fusedSilicaQuartzSub.metrologyLidt fusedSilicaQuartzSub.metrologyLidtDesc

fusedSilicaQuartzSub.metrologyBirefringence fusedSilicaQuartzSub.metrologyBirefringenceDesc

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ISO 9001:2015 SEMI MF1530 MIL-PRF-13830B ISO 21254 (LIDT)

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