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100mm – 300mm borofloat33Sub.statLabelDiameter

3.25 ppm/K borofloat33Sub.statLabelCte

525°C borofloat33Sub.statLabelStrain

Anodic Bond Ready borofloat33Sub.statLabelBonding

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Borofloat 33 Glass

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CTE (20–300°C) 3.25 ppm/K

Strain Point 525°C

Wafer Sizes 100mm – 300mm

Cost $ – $$

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Silicon (Si)

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CTE (20–300°C) 2.6 ppm/K

Optical Opaque (visible)

Wafer Sizes 100mm – 300mm

Cost $$ – $$$

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borofloat33Sub.etchRateLabel ~7 μm/min

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borofloat33Sub.bondStrengthLabel > 10 MPa

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borofloat33Sub.viaAspectLabel Up to 10:1

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Parameter	Available Range / Values
Material	Borofloat 33 (SCHOTT), equivalent borosilicate float glass
Diameter	100mm (4″), 150mm (6″), 200mm (8″), 300mm (12″)
Thickness	200μm–1,100μm, standard SEMI thicknesses
CTE (20–300°C)	3.25 × 10⁻⁶/K
Strain Point	525°C
Softening Point	825°C
Density	2.20 g/cm³
Refractive Index	n₅₈₉ = 1.4714
Dielectric Constant	4.6 at 1 MHz
Surface Roughness (AFM RMS)	< 1.0nm standard
TTV	≤ 5μm
Bow / Warp	Bow ≤ 25μm
Transmission Range	> 90% from 310nm to 2,700nm
Chemical Resistance	Hydrolytic Class 1, Acid Class 1, Alkali Class 2 (per ISO 719 / DIN 12116)
Surface Finish	SSP (Single-Side Polish) or DSP (Double-Side Polish), fire-polished or CMP
Packaging	Interleaved cleanroom paper, single-wafer cassette, vacuum-sealed

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ISO 9001:2015 SCHOTT Borofloat 33 ISO 719 (Hydrolytic) SEMI MF1530

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