Photolithography Service

Ginechip | Silicon Wafer Distribution & Advanced MEMS Lithography Service

Silicon Wafer Distribution
& Advanced MEMS Lithography Service

Precision Patterning from Microns to Nanometers

Your Reliable Partner in Semiconductor Materials & Precision Microfabrication

Ginechip combines premium silicon wafer distribution with professional MEMS lithography service to support the entire product development cycle — from research prototypes to small-to-medium volume production.

We offer multiple lithography technologies including contact, stepper, laser direct write, and e-beam lithography, achieving resolutions as fine as 10nm. This enables high-precision patterning on silicon, SOI, glass, sapphire, and flexible substrates.

With strict process control, advanced cleanroom facilities, and experienced engineers, we help customers in MEMS, sensors, photonics, and power electronics accelerate innovation while reducing development time and cost.

10nm

Minimum Resolution

15+

Years Experience

Global

Fast Delivery

ISO

Certified Quality

Professional MEMS Foundry Lithography Service

We deliver high-precision photo lithography and nanofabrication services for MEMS devices, sensors, micro-optics, and advanced semiconductor applications.

Service Overview

Lithography is a core process in semiconductor and MEMS manufacturing. It uses exposure and development to create geometric patterns on photoresist, which are then transferred onto the substrate via etching. Ginechip offers both mask-based (contact & stepper) and maskless (laser direct write & e-beam) MEMS lithography service, supporting a wide range of substrates including silicon wafers, SOI, glass, sapphire, and flexible materials.

Technical Capabilities

Contact Lithography

Minimum feature size: 0.8–1μm
Alignment accuracy: ±0.5μm
Ideal for large-area patterning and cost-effective production.

Stepper / Projection Lithography

Minimum feature size: 150nm (0.15μm)
Overlay accuracy: ≤40nm
High precision for volume manufacturing on 4"–8" wafers.

Laser Direct Writing

Minimum feature size: 300–500nm
Maskless and flexible — perfect for rapid prototyping and process verification.

E-beam Lithography

Minimum feature size: 10–30nm
Ultra-high resolution for nano-scale structures and research devices.

Supported wafer sizes: 4", 6", 8" (selected 12"). We also handle small pieces and custom substrates.

Advanced Facilities & Equipment

EVG 620NT Double-side Aligner
Canon & ASML Stepper Systems
Heidelberg DWL66+ Laser Direct Writer
JEOL JBX-9500FS E-beam Writer
Class 100 / 1000 Cleanroom Environment
Full metrology and inspection tools

Our Service Process Flow

01

Design Review & Mask Preparation

02

Wafer Cleaning & Photoresist Coating

03

Alignment & Exposure

04

Development & Pattern Inspection

05

Etching & Pattern Transfer

06

Final Metrology & Delivery

Our Expert Team

Our lithography team consists of senior process engineers with 8–18 years of hands-on experience in MEMS and semiconductor nanofabrication. They provide end-to-end support — from design consultation and process optimization to yield improvement.

Client Reviews

“Ginechip’s stepper lithography delivered excellent 0.15μm resolution and outstanding overlay accuracy for our MEMS pressure sensors. Highly recommended!”
— MEMS Sensor Manufacturer
“Their e-beam lithography enabled us to prototype nano-scale photonic structures down to 20nm with perfect results. Fast turnaround and professional support.”
— University Research Lab
“Reliable partner for both silicon wafers and lithography. Their one-stop service saved us significant time and cost.”
— IoT Device Company

Why Trust Ginechip?

  • One-stop solution combining wafer supply and lithography
  • Advanced equipment with proven nanometer-level precision
  • Fast prototyping to production turnaround
  • Strict quality control and full process traceability
  • Technical consultation by experienced engineers

Key Applications

Our MEMS lithography service powers innovation across multiple high-tech industries

MEMS Sensors

Accelerometers, gyroscopes, pressure, and gas sensors

Microfluidics

Lab-on-a-chip and biomedical diagnostic systems

Micro-Optics

Lenses, gratings, and diffractive optical elements

Power Electronics

IGBTs, MOSFETs, and high-voltage devices

Photonics

Waveguides, modulators, and photonic integrated circuits

Biomedical Devices

Implantable sensors and diagnostic microsystems

Automotive MEMS

TPMS, inertial sensors, and ADAS components

Aerospace & Defense

Radiation-hardened devices and navigation systems

Consumer Electronics

Smartphone sensors, wearables, and IoT devices

Ready to Bring Your MEMS Project to Life?

Contact us today for a competitive quote on silicon wafers or our precision MEMS lithography service.

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Expert technical support included • Fast response within 24 hours